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Zeiss Auriga 60 (Auriga 60)

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Karlsruhe

The Zeiss Auriga 60 Dual Beam FIB is a combination of a scanning electron microscope (SEM) and a focused ion beam (FIB) system, which allows imaging and structuring of materials at the nanoscale. It is a DualBeam FIB with EDX, EBSD and vacuum transfer system.

It is equipped with an Omniprobe micromanipulator, an EDAX EDX and EBSD system, a vacuum transfer holder and electrical feed-throughs for in-situ experiments

Configuration

  • Operation Voltage:
    • High Tension SEM: 200 V - 30 kV
    • High Tension FIB: 0.2 kV - 30 kV
  • Source
    • FEG (Schottky)
    • Gallium Liquid Metal Ion Source
  • Imaging Detectors:
    • In-lens SE, SESI, EsB, 4QBSD
    • STEM detector
  • Spectroscopy
    • EDAX EDX detector
  • Diffraction
    • EDAX EBSD detector
  • Gas Injection System (GIS)
    • C, Pt, and Si
    • XeF2 for selective etch enhancing
    • Gas injection for charge compensation
  • Manipulators
    • Omniprobe 400 with independent x,y, z motion and rotation
  • Transfer System
    • High-vacuum transfer system compatible with glove box and UHV deposition system

Resolution

30 kV

Electron Beam [nm]: 1.0
Gallium Ion Beam [nm] : 2.5

15 kV

Electron Beam [nm]: 1.0

1 kV

Electron Beam [nm]: 1.9

Imaging, Analysis and Sample Preparation Techniques

  • SE & BSE SEM analysis
  • STEM imaging
  • EDX analysis
  • EBSD analysis
  • 3D Slice & View tomography
  • TEM sample preparation
  • Nanoscale deposition and contacting

Access
Operated as part of the Karlsruhe Nano Micro Facility. Proposal based access; see:

Link: https://www.knmf.kit.edu/
Zeiss Auriga 60 Image

Helmholtz Imaging spinning wheel

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