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Tescan Solaris X (Solaris X)

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Karlsruhe

Tescan Solaris X DualBeam FIB equipped with Omniprobe micromanipulator and option for 3D Slice&View and TEM sample preparation.
The Tescan Solaris X, is a combination of a scanning electron microscope (SEM) and a focused ion beam (FIB) system, which allows imaging and structuring of materials at the nanoscale.

Configuration

  • Operation Voltage:
    • High Tension SEM: 200 V - 30 kV
    • High Tension FIB: 3 kV - 30 kV
  • Source
    • FEG (Schottky)
    • Xenon Plasma Source
  • Imaging Detectors:
    • InBeam SE, (energy filtered) BSE, mid-angle BSE
    • Retractable LBSE detector
    • Retractable STEM detector
  • Gas Injection System (GIS)
    • Multi-GIS (W, Pt, XeF2, C)
  • Manipulators
    • Omniprobe 400 with independent x,y, z motion and rotation

Resolution

30 kV

Electron Beam [nm]: 0.5

Gallium Ion Beam [nm]: 12

15 kV

Electron Beam [nm]: 0.6

1 kV

Electron Beam [nm]: 1.2

Imaging, Analysis and Sample Preparation Techniques

  • SE & BSE SEM analysis
  • STEM imaging
  • 3D Slice & View tomography
  • TEM sample preparation
  • Nanoscale deposition and contacting

Access
Operated as part of the Karlsruhe Nano Micro Facility. Proposal based access; see:

Link: https://www.knmf.kit.edu/
Tescan Solaris X Image

Helmholtz Imaging spinning wheel

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