The Phoenix Nanotom® M is a nanofocus X-ray CT system for scientific and industrial computed tomography (microCT and nanoCT®) and 3D metrology. The system realizes a unique spatial and contrast resolution on a wide sample …
IONTOF ToF.SIMS.5 time-of-flight secondary ion mass spectrometer
The imaging beamline (IBL) is dedicated to micro- and nanotomography at energies between 5 keV and 50 keV. The flexible design of the experimental stations allows for the investigation of samples with diameters ranging seamlessly …
he second experimental hutch contains the micro tomography setup of P05. At a sample distance of 87 m from the source, the horizontal full width at half maximum of the beam is 5.6 mm which …
The nanotomography endstation in the experimental hutch 1, designed to allow 3D resolutions of below 100 nm, is currently under construction. As X-ray optics we will use compound refractive lenses (CRLs), made from SU-8 polymer …
Point Resolution TEM …
Field-emitting scanning electron microscope with Bruker Quantax XFlash Flat Quad energy-dispersive X-ray spectrometer.
high-resolution imaging (SE, BSE, STEM)elemental nano-analytics
A scanning helium ion microscope is an imaging technology based on a scanning helium ion beam. Similar to other focused ion beam techniques, it allows to combine milling and cutting of samples with their observation …
