Atomic force microscopy (AFM) or scanning force microscopy (SFM) is a very-high-resolution type of scanning probe microscopy (SPM), with demonstrated resolution on the order of fractions of a nanometer, more than 1000 times better than …
See also:
Karlsruhe Nano Micro Facility on AFM (PDF)
Atomic Force Microscopy for Particle Surfaces at HZDR
AFM at HZDR
Experimental methods at HZDR's Institute of Resource Ecology