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Scanning Auger Microscope (SAM)

Site:

Hamburg

RESOLUTION (nm)

- 10.0 -

ENERGY (keV)

25.0

DETECTOR

PHI 710 Scanning Auger Nanoprobe

PHI 710 Scanning Auger Nanoprobe instrument
Energy range, electrons, 1-25 keV
Nominal lateral resolution < 10 nm (elements with low concentrations)
Coaxial cylindrical mirror analyser
Argon ion gun (5 kV) for surface cleaning, charge neutralization and Auger compositional depth profiling
Image registration to enhance imaging stability
Motorized five-axis specimen stage
Intro camera and ion gauge
Navigation software to re-localize pre-defined positions on the sample surface

Acquisition Parameter:

Image registration to enhance imaging stability

Weblinks

photon-science.desy…

Scanning Auger Microscope in Helmholtz Imaging CONNECT:

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Facility

DESY NanoLab

The DESY Nanolaboratory (DESY NanoLab) is a facility providing access to advanced nano-characterization, nano-structuring and nano-synthesis techniques which are complementary to the advanced X-ray techniques available at DESY’s lightsources. The DESY NanoLab consists of several …

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➤Applications: 2 ➤Centers: 1 ➤Instruments: 7 ➤Labs: 0 ➤Modalities: 10 ➤Experts: 1 ➤Solutions: 0

Center

Deutsches Elektronen-Synchrotron (DESY)

DESY is one of the world’s leading accelerator centres. Researchers use the large-scale facilities at DESY to explore the microcosm in all its variety – from the interactions of tiny elementary particles and the behaviour …

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➤Applications: 152 ➤Facilities: 4 ➤Instruments: 21 ➤Labs: 86 ➤Modalities: 237 ➤Experts: 32 ➤Solutions: 4

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Modality

Auger Electron Spectroscopy (AES)

Auger electron spectroscopy (AES; pronounced [oʒe] in French) is a common analytical technique used specifically in the study of surfaces and, more generally, in the area of materials science. It is a form of electron …

Auger electron spectroscopy (AES) is used to determine the elemental composition and, in many cases, the chemical state of the atoms in the surface region of a solid, vacuum stable, not insulating material. AES has …

In Helmholtz Imaging CONNECT
➤Applications: 0 ➤Facilities: 3 ➤Centers: 3 ➤Instruments: 3 ➤Labs: 1 ➤Experts: 2 ➤Solutions: 0

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