Time-of-Flight Secondary Ion Mass Spectrometer (ToF-SIMS)
Site:
Eggenstein-Leopoldshafen
RESOLUTION
(nm)
150.0
-
-
The instrument is operated by the Laboratory for Microscopy and Spectroscopy from KIT.
Features
- Bi/Mn Source (Bi+, Bi3+, Bi3++, Mn+)
- Mass resolution: up to 11000 m/Δm @ 29 amu (bunched mode)
- Spatial resolution < 150 nm (collimated mode)
- Surface sensitivity < 5 nm
- Cs thermion source and O2 EI source for sputter depth profiling, Zalar-rotation possible
- Argon cluster ion source for analysis and sputter depth profiling of organic samples
- Transfer vessel for atmosphere contact free sample transport from glove boxes to the spectrometer
- Sample heating and cooling in UHV
- Max sample size: 6×7 cm
Time-of-Flight Secondary Ion Mass Spectrometer in Helmholtz Imaging CONNECT:
No expert found.
No application found.
No solution found.
