Nanoscale secondary ion mass spectrometry

NanoSIMS (nanoscale secondary ion mass spectrometry) is an analytical instrument manufactured by CAMECA which operates on the principle of secondary ion mass spectrometry. The NanoSIMS is used to acquire nanoscale resolution measurements of the elemental and isotopic composition of a sample. The NanoSIMS is able to create nanoscale maps of elemental or isotopic distribution, parallel acquisition of up to seven masses, isotopic identification, high mass resolution, subparts-per-million sensitivity with spatial resolution down to 50 nm.
The original design of the NanoSIMS instrument was conceived by Georges Slodzian at the University of Paris Sud in France and at the Office National d'Etudes et de Recherches Aérospatiales. There are currently around 50 NanoSIMS instruments worldwide.